METHOD, MEASURING DEVICE, MACHINING SYSTEM AND COMPUTER PROGRAM PRODUCT FOR DETERMINING A CORRECTED HEIGHT SIGNAL FROM MEASUREMENT DATA OBTAINED WITH OPTICAL COHERENCE TOMOGRAPHY
A method, measuring device, machining system and computer program product are provided for determining a corrected height signal from measurement data obtained with optical coherence tomography. The measurement data comprises an object signal and a background signal superimposed on the object signal...
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Zusammenfassung: | A method, measuring device, machining system and computer program product are provided for determining a corrected height signal from measurement data obtained with optical coherence tomography. The measurement data comprises an object signal and a background signal superimposed on the object signal, the object signal and the background signal being subject to different dispersion. A first transformation is performed comprising transforming the measurement data, the first transformation being targeted at the background signal to obtain a height signal, background components in the height signal are determined, the background components in the height signal are compensated to obtain a background-compensated height signal, an inverse transformation is performed comprising back-transforming the background-compensated height signal to obtain background-compensated measurement data, dispersion compensation for the object signal is performed to obtain dispersion-compensated and background-compensated measurement data, and a second transformation is performed comprising transforming the dispersion-compensated and background-compensated measurement data to obtain a dispersion-compensated and background-compensated height signal. |
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