ACTIVE CIRCUIT ELEMENTS ON A MEMBRANE

According to examples, an apparatus may include a substrate having a fluid recirculation channel and a membrane adjacent to the fluid recirculation channel, in which the membrane is portion of the substrate having a smaller thickness than other portions of the substrate. The apparatus may also inclu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Martin, Eric T, Przybyla, James R
Format: Patent
Sprache:eng
Schlagworte:
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