ACTIVE CIRCUIT ELEMENTS ON A MEMBRANE

According to examples, an apparatus may include a substrate having a fluid recirculation channel and a membrane adjacent to the fluid recirculation channel, in which the membrane is portion of the substrate having a smaller thickness than other portions of the substrate. The apparatus may also inclu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Martin, Eric T, Przybyla, James R
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:According to examples, an apparatus may include a substrate having a fluid recirculation channel and a membrane adjacent to the fluid recirculation channel, in which the membrane is portion of the substrate having a smaller thickness than other portions of the substrate. The apparatus may also include a component layer, in which a fluid ejection chamber may be formed in the component layer. The fluid ejection chamber may include a nozzle and fluid may be received into the fluid ejection chamber through an inlet port and recirculated to the fluid recirculation channel through an outlet port. The apparatus may further include active circuit elements formed on the membrane, in which the active circuit elements may control ejection of fluid from the fluid ejection chamber through the nozzle.