SEMICONDUCTOR MEMORY DEVICE
A semiconductor memory device includes a stacked structure including insulating layers and conductive layers that are alternately disposed in a vertical direction, a first structure including a channel layer that passes through the stacked structure and a memory pattern between the channel layer and...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A semiconductor memory device includes a stacked structure including insulating layers and conductive layers that are alternately disposed in a vertical direction, a first structure including a channel layer that passes through the stacked structure and a memory pattern between the channel layer and the stacked structure, and a second structure including an insulating pattern that is formed along a sidewall of the stacked structure and a gate pattern that is formed on a sidewall of the insulating pattern. |
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