MEMS MICROPHONE

Provided is a MEMS microphone, including a base which forms a back cavity, and a capacitor system arranged on the base and connected to the base. The capacitor system includes a diaphragm located above the base and a backplate spaced from the diaphragm; and the MEMS microphone further includes a barrier structure, and the barrier structure is spaced from the capacitor system in a vibration direction. The barrier structure spaced from the capacitor system in the vibration direction can ensure that the movement of the diaphragm and the backplate is not affected under low sound pressure, so as not to affect the performance of the microphone, and can hinder the deformation of the diaphragm and the backplate under large sound pressure, thereby inhibiting failure of the microphone caused by fracture due to large deformation of the diaphragm and the backplate.