Electrostatic Discharge Protection Device Having Multiple Pairs of PN Stripes and Methods of Fabrication Thereof

An ESD protection device includes a deep well having a first conductivity type, a well having the first conductivity type disposed in at least a portion of the deep well, proximate an upper surface of the deep well, and a drain region having a second conductivity type disposed in a portion of the de...

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Hauptverfasser: Ren, Xiaowei, Gao, Zihao M
Format: Patent
Sprache:eng
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Zusammenfassung:An ESD protection device includes a deep well having a first conductivity type, a well having the first conductivity type disposed in at least a portion of the deep well, proximate an upper surface of the deep well, and a drain region having a second conductivity type disposed in a portion of the deep well, proximate the upper surface of the deep well. A source structure is disposed in a portion of the well, proximate an upper surface of the well and spaced laterally from the drain region. The source structure includes multiple pairs of stripe regions, each of the stripe regions including a doped region of the first conductivity type and a doped region of the second conductivity type disposed laterally adjacent to one another. A gate is disposed over the well, between the drain region and the source structure, the gate being electrically isolated from the well.