SYSTEM FOR STORING WAFER AND SYSTEM FOR MONITORING POLLUTION OF WAFER
A system for storing wafer is provided. The system includes a wafer box, an installing member, a detection tube, a control unit, and a detection unit. The wafer box includes an outlet connector and an inlet connector extending a wall of the wafer box. The installing member covers the wafer box to fo...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A system for storing wafer is provided. The system includes a wafer box, an installing member, a detection tube, a control unit, and a detection unit. The wafer box includes an outlet connector and an inlet connector extending a wall of the wafer box. The installing member covers the wafer box to form a sealed receiving room. Two ends of the detection tube are coupled to the outlet connector and the inlet connector. The control unit are configured to output a first control signal to the detection unit. The detection unit includes a first sensor arranged in the detection tube. The first sensor is configured to detect a property of gas to obtain data of an environment where the wafer is stored upon the first control signal. A related system for monitoring pollution of wafer is also provided. |
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