PHYSICALLY-INFORMED MULTI-SYSTEM HARDWARE OPERATING WINDOWS

Embodiments disclosed herein include a method for use with a semiconductor processing tool. In an embodiment, the method comprises configuring the semiconductor processing tool, running a benchmark test on the semiconductor processing tool, providing hardware operating window (HOW) analytics, genera...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Jang, Mi Hyun, Hong, Jeong Jin, Bhatia, Sidharth, Ummethala, Upendra, Maher, Joshua, Cheon, Sejune
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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