OPTICAL MEASUREMENT DEVICE

An optical measurement device is a measurement device that measures a distance to a target using light, and includes: a split unit to split light into reference light and measurement light; an adjustment unit to split the reference light into a plurality of beams of reference light having respective...

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Bibliographische Detailangaben
Hauptverfasser: YAMAUCHI, Takanori, NISHIOKA, Junya, GOTO, Hiroki, SUZUKI, Naoki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An optical measurement device is a measurement device that measures a distance to a target using light, and includes: a split unit to split light into reference light and measurement light; an adjustment unit to split the reference light into a plurality of beams of reference light having respective different light path lengths; an interference unit to multiplex two of reflection light obtained by reflection when a target is irradiated with the measurement light, and the plurality of beams of reference light to obtain interference light; and a processing unit to calculate a light path length difference on a basis of a frequency of the interference light, and the optical measurement device calculates light path length differences of the plurality of beams of reference light, so that it is possible to measure the distance to the target even when the distance to the target significantly fluctuates.