MULTI-LATERAL RECESSED MIM STRUCTURE

The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a dielectric stack disposed over a substrate. The dielectric stack has a first plurality of layers interleaved between a second plurality of layers. The dielectric stack has one or more surfaces...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Li, Sheng-Chan, Chen, Sheng-Chau, Lee, Ru-Liang, Kalnitsky, Alexander, Liu, Ming Chyi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a dielectric stack disposed over a substrate. The dielectric stack has a first plurality of layers interleaved between a second plurality of layers. The dielectric stack has one or more surfaces that define a plurality of indentations recessed into a side of the dielectric stack at different vertical heights corresponding to the second plurality of layers. A capacitor structure lines the one or more surfaces of the dielectric stack. The capacitor structure includes conductive electrodes separated by a capacitor dielectric.