Device Transfer Method, Device Transfer Machine, Target Object Transfer Method, and Target Object Transfer Machine

Proposed are a method and an apparatus for transferring devices arranged on a first substrate to a second substrate by using laser light while correcting positional deviations of the devices. The present invention involves: acquiring actual positional information about devices on the first substrate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Nakada, Satoki, Ozawa, Shusaku, Sato, Masahiko, Yamaoka, Hiroshi, Sato, Shinichi, Abe, Tsukasa, Noguchi, Tsuyoshi, Kurata, Masami, Uemori, Nobutaka, Saito, Takeshi, Usami, Taketo
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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