Device Transfer Method, Device Transfer Machine, Target Object Transfer Method, and Target Object Transfer Machine

Proposed are a method and an apparatus for transferring devices arranged on a first substrate to a second substrate by using laser light while correcting positional deviations of the devices. The present invention involves: acquiring actual positional information about devices on the first substrate; performing grouping in accordance with a criterion determined on the basis of an allowable positional deviation amount; correcting, for each group unit, a position of the first substrate such that positions of the devices fall into a range of an allowable positional deviation amount; and applying laser light from the back surface of the first substrate and transferring the devices to the second substrate.