LIGHT SENSOR MANUFACTURING METHOD

LIGHT SENSOR MANUFACTURING METHOD

The present description concerns a manufacturing method comprising, for each photodetector of an array of photodetectors of a light sensor, a use of a mask obtained by directed self-assembly of a block copolymer to form, by a first etch step, at least one first structure on the side of a first surfa...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: BARLAS, Marios, ABADIE, Quentin
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The present description concerns a manufacturing method comprising, for each photodetector of an array of photodetectors of a light sensor, a use of a mask obtained by directed self-assembly of a block copolymer to form, by a first etch step, at least one first structure on the side of a first surface of the photodetector intended to receive light.