THERMAL FLOW METER

Provided is a highly reliable thermal flow meter. In a thermal flow meter 20, a flow rate detection element 321 that detects an air flow rate, and a conductive coating film 400 containing a conductive substance and a resin as constituent elements are provided on at least a part of a portion provided...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FATIN FARHANAH, Binti Haridan, SHIBATA, Mizuki, UENODAN, Akira, ABE, Hiroyuki, YOGO, Takayuki
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Provided is a highly reliable thermal flow meter. In a thermal flow meter 20, a flow rate detection element 321 that detects an air flow rate, and a conductive coating film 400 containing a conductive substance and a resin as constituent elements are provided on at least a part of a portion provided in an auxiliary passage 135 on a surface facing a detection surface 322 of the flow rate detection element 321.