Optical Measurement System with Multiple Launch Sites

Various embodiments disclosed herein describe optical measurement systems for characterizing a sample. The optical measurement systems may selectively emit light from different numbers of launch groups, and may include a multi-stage optical switch network that may be controlled to route light to a d...

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Bibliographische Detailangaben
Hauptverfasser: Arbore, Mark A, Gan, Lucia, Tu, Yongming, Greening, Thomas C, Pelc, Jason S, Terrel, Matthew A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Various embodiments disclosed herein describe optical measurement systems for characterizing a sample. The optical measurement systems may selectively emit light from different numbers of launch groups, and may include a multi-stage optical switch network that may be controlled to route light to a desired number of launch groups. The optical measurement systems may further measure light using a corresponding number of detector groups. The optical measurement systems may perform measurements using a plurality of different wavelengths, where different groups of these wavelengths may be measured using different numbers of launch groups (as well as corresponding detector groups).