FILTER ISOLATION FOR REDUCED STARTUP TIME IN LOW RELATIVE HUMIDITY EQUIPMENT FRONT END MODULE

Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum at a top of the EFEM, the upper plenum in fluid communication with the EFEM chamber, a plurality of du...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Reuter, Paul B, Tindel, Steven Trey
Format:	Patent
Sprache:	eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

container_end_page
container_issue
container_start_page
container_title
container_volume
creator	Reuter, Paul B Tindel, Steven Trey
description	Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum at a top of the EFEM, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, one or more filters in fluid communication with the upper plenum and the EFEM chamber and at least one isolation component configured to removably attach to the EFEM to isolate at least the one or more filters from an ambient environment when the EFEM is opened to the ambient environment.
format	Patent
fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2023321583A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2023321583A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2023321583A13</originalsourceid><addsrcrecordid>eNqNissKwjAQAHvxIOo_LHgWbILgNTQbupBHTTcVD1KKxJNoof4_VvADvMwcZpbF1ZBljEBtsIopeDAhQkSdKtTQsoqcGmByCOTBhvPcvmOHUCdHmvgCeErUOPQMJoaZ6DW4oJPFdbG4D48pb35eFVuDXNW7PL76PI3DLT_zu0-t2AspRXk4SlXK_64P0rUzvw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>FILTER ISOLATION FOR REDUCED STARTUP TIME IN LOW RELATIVE HUMIDITY EQUIPMENT FRONT END MODULE</title><source>esp@cenet</source><creator>Reuter, Paul B ; Tindel, Steven Trey</creator><creatorcontrib>Reuter, Paul B ; Tindel, Steven Trey</creatorcontrib><description>Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum at a top of the EFEM, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, one or more filters in fluid communication with the upper plenum and the EFEM chamber and at least one isolation component configured to removably attach to the EFEM to isolate at least the one or more filters from an ambient environment when the EFEM is opened to the ambient environment.</description><language>eng</language><subject>PERFORMING OPERATIONS ; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL ; SEPARATION ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20231012&DB=EPODOC&CC=US&NR=2023321583A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20231012&DB=EPODOC&CC=US&NR=2023321583A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Reuter, Paul B</creatorcontrib><creatorcontrib>Tindel, Steven Trey</creatorcontrib><title>FILTER ISOLATION FOR REDUCED STARTUP TIME IN LOW RELATIVE HUMIDITY EQUIPMENT FRONT END MODULE</title><description>Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum at a top of the EFEM, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, one or more filters in fluid communication with the upper plenum and the EFEM chamber and at least one isolation component configured to removably attach to the EFEM to isolate at least the one or more filters from an ambient environment when the EFEM is opened to the ambient environment.</description><subject>PERFORMING OPERATIONS</subject><subject>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</subject><subject>SEPARATION</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNissKwjAQAHvxIOo_LHgWbILgNTQbupBHTTcVD1KKxJNoof4_VvADvMwcZpbF1ZBljEBtsIopeDAhQkSdKtTQsoqcGmByCOTBhvPcvmOHUCdHmvgCeErUOPQMJoaZ6DW4oJPFdbG4D48pb35eFVuDXNW7PL76PI3DLT_zu0-t2AspRXk4SlXK_64P0rUzvw</recordid><startdate>20231012</startdate><enddate>20231012</enddate><creator>Reuter, Paul B</creator><creator>Tindel, Steven Trey</creator><scope>EVB</scope></search><sort><creationdate>20231012</creationdate><title>FILTER ISOLATION FOR REDUCED STARTUP TIME IN LOW RELATIVE HUMIDITY EQUIPMENT FRONT END MODULE</title><author>Reuter, Paul B ; Tindel, Steven Trey</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2023321583A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2023</creationdate><topic>PERFORMING OPERATIONS</topic><topic>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</topic><topic>SEPARATION</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Reuter, Paul B</creatorcontrib><creatorcontrib>Tindel, Steven Trey</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Reuter, Paul B</au><au>Tindel, Steven Trey</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>FILTER ISOLATION FOR REDUCED STARTUP TIME IN LOW RELATIVE HUMIDITY EQUIPMENT FRONT END MODULE</title><date>2023-10-12</date><risdate>2023</risdate><abstract>Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum at a top of the EFEM, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, one or more filters in fluid communication with the upper plenum and the EFEM chamber and at least one isolation component configured to removably attach to the EFEM to isolate at least the one or more filters from an ambient environment when the EFEM is opened to the ambient environment.</abstract><oa>free_for_read</oa></addata></record>
fulltext	fulltext_linktorsrc
identifier
ispartof
issn
language	eng
recordid	cdi_epo_espacenet_US2023321583A1
source	esp@cenet
subjects	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
title	FILTER ISOLATION FOR REDUCED STARTUP TIME IN LOW RELATIVE HUMIDITY EQUIPMENT FRONT END MODULE
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-30T23%3A11%3A59IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Reuter,%20Paul%20B&rft.date=2023-10-12&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2023321583A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true