FILTER ISOLATION FOR REDUCED STARTUP TIME IN LOW RELATIVE HUMIDITY EQUIPMENT FRONT END MODULE

Disclosed herein are systems and methods for reducing startup time of an equipment front end module (EFEM). The EFEM may include an EFEM chamber formed between a plurality of walls, an upper plenum at a top of the EFEM, the upper plenum in fluid communication with the EFEM chamber, a plurality of ducts that provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, one or more filters in fluid communication with the upper plenum and the EFEM chamber and at least one isolation component configured to removably attach to the EFEM to isolate at least the one or more filters from an ambient environment when the EFEM is opened to the ambient environment.