DEPOSITION METHODS AND APPARATUS FOR PIEZOELECTRIC APPLICATIONS

DEPOSITION METHODS AND APPARATUS FOR PIEZOELECTRIC APPLICATIONS

Disclosed are methods and apparatus for depositing uniform layers on a substrate (201) for piezoelectric applications. An ultra-thin seed layer (308) having a uniform thickness from center to edge thereof is deposited on a substrate (201). A template layer (310) closely matching the crystal structur...

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Bibliographische Detailangaben
Hauptverfasser: RAMAKRISHNAN, Bharatwaj, PAI, Uday, SANGLE, Abhijeet Laxman, PATIL, Nilesh, XUE, Yuan, KADAM, Ankur, SHARMA, Vijay Bhan
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:Disclosed are methods and apparatus for depositing uniform layers on a substrate (201) for piezoelectric applications. An ultra-thin seed layer (308) having a uniform thickness from center to edge thereof is deposited on a substrate (201). A template layer (310) closely matching the crystal structure of a subsequently formed piezoelectric material layer (312) is deposited on a substrate (201). The uniform thickness and orientation of the seed layer (308) and the template layer (310), in turn, facilitate the growth of piezoelectric materials with improved crystallinity and piezoelectric properties.