DEPOSITION MASK STAGE, DISPLAY MANUFACTURING APPARATUS INCLUDING THE SAME, AND DISPLAY MANUFACTURING METHOD USING THE SAME

DEPOSITION MASK STAGE, DISPLAY MANUFACTURING APPARATUS INCLUDING THE SAME, AND DISPLAY MANUFACTURING METHOD USING THE SAME

Disclosed is a deposition mask stage comprising a stage frame, chucks combined with the stage frame, and support blocks on a back side of the stage frame. The chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage f...

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Bibliographische Detailangaben
Hauptverfasser: KIM, JONGBUM, AHN, HONG-KYUN, KO, JUNHYEUK, KIM, EUIGYU, MOON, JAESUK, YI, SANG MIN, CHUNG, KYUNGHOON
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Disclosed is a deposition mask stage comprising a stage frame, chucks combined with the stage frame, and support blocks on a back side of the stage frame. The chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage frame. The first and second directions intersect each other. The support blocks are spaced apart from each other in the first direction and the second direction on the back side of the stage frame.