DESIGNS OF THERMAL INSULATION FOR MICRO-RING RESONATOR (MRR) IN ON-CAVITY PIC (OCPIC) TO ACHIEVE EFFECTIVE THERMAL TUNING

DESIGNS OF THERMAL INSULATION FOR MICRO-RING RESONATOR (MRR) IN ON-CAVITY PIC (OCPIC) TO ACHIEVE EFFECTIVE THERMAL TUNING

Embodiments disclosed herein include optoelectronic systems and methods of forming such systems. In an embodiment, an optoelectronic system comprises a first substrate, a second substrate over the first substrate, and a micro-ring resonator (MRR) over the second substrate. In an embodiment, a heater...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KARHADE, Omkar, CHIU, Chia-Pin, HOSSEINI, Kaveh
Format: Patent
Sprache:eng
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:Embodiments disclosed herein include optoelectronic systems and methods of forming such systems. In an embodiment, an optoelectronic system comprises a first substrate, a second substrate over the first substrate, and a micro-ring resonator (MRR) over the second substrate. In an embodiment, a heater is integrated into the MRR, a cladding is over the MRR, and an opening is through the first substrate and the second substrate to expose a bottom surface of the MRR.