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A ceramic containing, in mass %:Si3N4: 20.0 to 60.0%,ZrO2: 25.0 to 70.0%,at least one selected from SiC and AlN: 2.0 to 17.0%, where AlN is 10.0% or less,at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5: 5.0 to 15.0%, wherein F...

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Bibliographische Detailangaben
Hauptverfasser: MORI, Kazumasa, YAMAGISHI, Wataru, ETO, Shunichi
Format: Patent
Sprache:eng
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Zusammenfassung:A ceramic containing, in mass %:Si3N4: 20.0 to 60.0%,ZrO2: 25.0 to 70.0%,at least one selected from SiC and AlN: 2.0 to 17.0%, where AlN is 10.0% or less,at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5: 5.0 to 15.0%, wherein Fn calculated from the following equation (1) satisfies 0.02 to 0.40. This ceramic can be laser machined with high efficiency.Fn=(SiC+3AlN)/(Si3N4+ZrO2)  (1)