SEMICONDUCTOR DIE HAVING A SODIUM STOPPER IN AN INSULATION LAYER GROOVE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DIE HAVING A SODIUM STOPPER IN AN INSULATION LAYER GROOVE AND METHOD OF MANUFACTURING THE SAME

The application relates to a semiconductor die having a semiconductor body including an active region, an insulation layer on the semiconductor body, and a sodium stopper formed in the insulation layer. The sodium stopper is arranged in an insulation layer groove which intersects the insulation laye...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Neumann, Ingmar, Blank, Oliver, Altstätter, Christof
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The application relates to a semiconductor die having a semiconductor body including an active region, an insulation layer on the semiconductor body, and a sodium stopper formed in the insulation layer. The sodium stopper is arranged in an insulation layer groove which intersects the insulation layer vertically and extends around the active region. The sodium stopper is formed of a tungsten material that at least partly fills the insulation layer groove. Both the insulation layer groove and the tungsten material extend into the semiconductor body.