MEMORY DEVICE AND MANUFACTURING METHOD OF THE MEMORY DEVICE

MEMORY DEVICE AND MANUFACTURING METHOD OF THE MEMORY DEVICE

There are provided a memory device and a manufacturing method of the memory device. The memory device includes: a source structure; and a stack structure over the source structure, the stack structure including a plug and a slit, wherein the slit includes a source contact being connected to the sour...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KIM, Chul Young, BIN, Jin Ho, YOO, Young Tae, KIM, Hyun Sub
Format: Patent
Sprache:eng
Schlagworte:
INFORMATION STORAGE
PHYSICS
STATIC STORES
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:There are provided a memory device and a manufacturing method of the memory device. The memory device includes: a source structure; and a stack structure over the source structure, the stack structure including a plug and a slit, wherein the slit includes a source contact being connected to the source structure.