SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE

A semiconductor structure includes a semiconductor substrate, a serpentine-shaped resistor, and a MOS transistor. The semiconductor substrate includes an isolation structure and an active region. The serpentine-shaped resistor is over the isolation structure. The serpentine-shaped resistor extends i...

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Bibliographische Detailangaben
Hauptverfasser: CHENG, HSIN-LI, TSUI, YINGKIT FELIX, KUO, LIANG-TAI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor structure includes a semiconductor substrate, a serpentine-shaped resistor, and a MOS transistor. The semiconductor substrate includes an isolation structure and an active region. The serpentine-shaped resistor is over the isolation structure. The serpentine-shaped resistor extends in a length direction and has a width that is equal to or greater than about 3.6 μm in a width direction. The MOS transistor is over the active region of the semiconductor substrate.