CAPACITIVE FLEXIBLE TACTILE SENSOR BASED ON GRADED INCLINED MICRO-CYLINDER STRUCTURE

CAPACITIVE FLEXIBLE TACTILE SENSOR BASED ON GRADED INCLINED MICRO-CYLINDER STRUCTURE

A capacitive flexible tactile sensor based on graded inclined micro-cylindrical structure, includes an upper electrode layer, a lower electrode layer and a dielectric layer between them. The dielectric layer is composed of an upper dielectric layer and a lower dielectric layer. The upper dielectric...

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Bibliographische Detailangaben
Hauptverfasser: CHEN, Zhiliang, YANG, Lixia, YANG, Liangpan, GUI, Pengbin, WANG, Siliang, HAUNG, Zhixiang, ZENG, Wei, XU, Yaohua, GUO, Xiaohui
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A capacitive flexible tactile sensor based on graded inclined micro-cylindrical structure, includes an upper electrode layer, a lower electrode layer and a dielectric layer between them. The dielectric layer is composed of an upper dielectric layer and a lower dielectric layer. The upper dielectric layer includes an upper dielectric layer base, upper dielectric layer long micro-cylinders and upper dielectric layer short micro-cylinders. The lower dielectric layer includes lower dielectric layer base, lower dielectric layer long micro-cylinder and lower dielectric layer short micro-cylinder. The upper dielectric layer long micro-cylinders and the lower dielectric layer long micro-cylinders are closely bonded, and there is a distance between the upper dielectric layer short micro-cylinder and the lower dielectric layer short micro-cylinder. The sensor structure of the present application is stable, overcomes the viscous effect.