HETERODYNING OPTICAL PHASE MEASURING DEVICE FOR DIFFRACTION BASED OVERLAY

Methods and systems are provided for diffraction-based overlay (DBO) metrology of a multilayered sample. In one example, a method may include generating spatially structured light via a light source and an optical modulator, transmitting the spatially structured light onto the multilayered sample, d...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Darwin, Michael J
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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