HETERODYNING OPTICAL PHASE MEASURING DEVICE FOR DIFFRACTION BASED OVERLAY

HETERODYNING OPTICAL PHASE MEASURING DEVICE FOR DIFFRACTION BASED OVERLAY

Methods and systems are provided for diffraction-based overlay (DBO) metrology of a multilayered sample. In one example, a method may include generating spatially structured light via a light source and an optical modulator, transmitting the spatially structured light onto the multilayered sample, d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Darwin, Michael J
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Methods and systems are provided for diffraction-based overlay (DBO) metrology of a multilayered sample. In one example, a method may include generating spatially structured light via a light source and an optical modulator, transmitting the spatially structured light onto the multilayered sample, detecting diffracted spatially structured light at one or more of a plurality of sensors, and estimating an overlay error of the multilayered sample based on the diffracted spatially structured light detected at the one or more of the plurality of sensors.