ASSEMBLY FOR REPLICATING FLEXIBLE STAMPS FROM A MASTER

An assembly includes a master for imprinting of micro-structures and nano-structures. The master has on its upper surface an active area with relief structure for imprinting of the micro-structures and nano-structures, and the master has a thickness dmaster. The assembly includes frame pieces arrang...

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Bibliographische Detailangaben
Hauptverfasser:	TITULAER, Bram Johannes, TER MEULEN, Jan Matthijs, VELDHUIZEN, Leon Willem
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY LINING MACHINES MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTING STAMPING OR NUMBERING APPARATUS OR DEVICES STAMPS TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	An assembly includes a master for imprinting of micro-structures and nano-structures. The master has on its upper surface an active area with relief structure for imprinting of the micro-structures and nano-structures, and the master has a thickness dmaster. The assembly includes frame pieces arranged around and flushing along the outer circumference of the master, with the frame pieces having a thickness dframe. The thickness dframe of the frame pieces deviates from the thickness dmaster of the master by at most 250 µm. A a flexible stamp has improved alignment.