PROCESS FOR THE OBTAINMENT OF SUSPENDED DOUBLE-FLAT SU-8 JANUS CHIPS, SAID SUSPENDED DOUBLE-FLAT SU-8 JANUS CHIPS AND SUSPENDED ARRAY THEREOF

The invention relates to a process for the obtainment of suspended double-flat SU-8 Janus chips by means of SU-8 photolithography to create an arrangement of ordered SU-8 chips on a substrate and soft lithography to create a planar printed arrangement or a planar printed array on each chip, said pro...

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Bibliographische Detailangaben
Hauptverfasser:	AGUSIL ANTONOFF, Juan Pablo, PLAZA PLAZA, Jose Antonio
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a process for the obtainment of suspended double-flat SU-8 Janus chips by means of SU-8 photolithography to create an arrangement of ordered SU-8 chips on a substrate and soft lithography to create a planar printed arrangement or a planar printed array on each chip, said process comprising steps for forming a solidified membrane that is peeled off and dissolved in an aqueous medium. Furthermore, the invention relates to the suspended double-flat SU-8 Janus chips and to a suspended array comprises at least two different suspended double-flat SU-8 Janus chips. Lastly, the invention relates to barcoding chips and to sensing devices comprising said suspended double-flat SU-8 Janus chips or said suspended array.