METHOD OF EVALUATING ANISOTROPY AND ANISOTROPY EVALUATION APPARATUS

There is provided a technique capable of evaluating an anisotropy of an object with a large field of view, in a non-destructive manner and with high angular resolution. An object 1 is irradiated with X-rays from a radiation source 22 of a phase-contrast X-ray optical system 2. A change characteristi...

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Bibliographische Detailangaben
Hauptverfasser:	MIURA, Yuzo, OKAJIMA, Kenichi, NAGAMATSU, Yuichi, KURIBAYASHI, Masaru, KAGEYAMA, Masashi
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	There is provided a technique capable of evaluating an anisotropy of an object with a large field of view, in a non-destructive manner and with high angular resolution. An object 1 is irradiated with X-rays from a radiation source 22 of a phase-contrast X-ray optical system 2. A change characteristic in X-ray scattering intensities for individual relative angles each formed between an incident angle of the X-rays and an anisotropic structure in the object 1 are then acquired. Evaluation data for evaluating a state of the anisotropic structure in the object 1 is then generated based on the change characteristic in the X-ray scattering intensities.