INSPECTION DEVICE

An inspection device includes: a light source for outputting pulsed excitation light with a time width of 10 picoseconds to 10 nanoseconds; a nonlinear optical crystal for generating a terahertz wave by optical wavelength conversion of the pulsed excitation light; a polarization part for reflecting...

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Bibliographische Detailangaben
Hauptverfasser:	Kamino, Yuichiro, Minamide, Hiroaki, Yamamoto, Syusaku, Nawata, Koji, Kajikawa, Keisuke
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An inspection device includes: a light source for outputting pulsed excitation light with a time width of 10 picoseconds to 10 nanoseconds; a nonlinear optical crystal for generating a terahertz wave by optical wavelength conversion of the pulsed excitation light; a polarization part for reflecting at least a part of a reflected wave of the terahertz wave reflected by an inspection target; and a detector for detecting the reflected wave reflected by the polarization part.