WELDING METHOD FOR CREATING AN UPSCALED MASTER

A method is for creating an upscaled master for an imprinting process. At least two masters are welded together, whereby at least one master includes at least partially at least one textured area. A photosensitive resin is at least applied between the two masters, whereby light of a light source is...

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Bibliographische Detailangaben
Hauptverfasser:	TITULAER, Bram Johannes, TER MEULEN, Jan Matthijs, VELDHUIZEN, Leon Willem
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A method is for creating an upscaled master for an imprinting process. At least two masters are welded together, whereby at least one master includes at least partially at least one textured area. A photosensitive resin is at least applied between the two masters, whereby light of a light source is guided within a waveguiding system and cures the photosensitive resin at least between the at least two submasters when the photosensitive resin comes into contact with the waveguiding system. An upscaled master is obtained by the method, and an imprinting product is obtained from the upscaled master. An apparatus makes an upscaled master by carrying out the method.