MPCVD DEVICE CAPABLE OF REALIZING EFFECTIVE DOPING

An MPCVD device capable of realizing effective doping, comprises a reaction chamber and a gas input structure, wherein the gas input structure includes a first pipeline and a second pipeline for reaction gas, a first gas distributor, connected with the first pipeline, uniformly transports gas as a first reactant into the reaction chamber through a gas outlet of the first pipeline located near the top of the reaction chamber, the second pipeline uniformly inputs a doped reaction gas to a surface of a substrate through a second gas distributor with circular shape, a height of the gas transport ring connected with the second pipeline is substantially the same as that of a support for the substrate, and the gas transport ring can be concentrically placed at a center position inside the support, or the gas transport ring can also be concentrically placed outside the support.