LOCATING MATERIAL INTERFACES ON RESONANT MIRROR SYSTEM

Examples are disclosed herein relating to reducing strain in a resonant scanning mirror system. One example provides a thin film piezoelectric-actuated resonant scanning mirror system, comprising a body comprising an anchor portion, a scanning mirror portion, a piezoelectric film support portion, a...

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Bibliographische Detailangaben

Hauptverfasser:	DAVIS, Wyatt Owen, ONG, Xiao Chuan, BARAN, Utku
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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