LOCATING MATERIAL INTERFACES ON RESONANT MIRROR SYSTEM

Examples are disclosed herein relating to reducing strain in a resonant scanning mirror system. One example provides a thin film piezoelectric-actuated resonant scanning mirror system, comprising a body comprising an anchor portion, a scanning mirror portion, a piezoelectric film support portion, a transmission beam extending from the piezoelectric thin film support portion, and a torsion beam extending between the scanning mirror portion and the transmission beam, and a piezoelectric film formed on the piezoelectric film support portion, the piezoelectric film support portion comprising an area of a surface of the body in which a stress on the piezoelectric film does not exceed a yield stress of the piezoelectric film during oscillation of the scanning mirror portion.