ELECTRONIC PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF

An electronic package structure and its manufacturing method are provided. The electronic package structure includes an interposer, a circuit board, a chip, and a circuit structure. The interposer includes an interposer substrate and a coaxial conductive element located in the interposer substrate....

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Bibliographische Detailangaben
Hauptverfasser: Wang, Chin-Sheng, Chen, Jun-Ho, Tain, Ra-Min, Lin, Wen-Yu, Wang, Tse-Wei, Ma, Guang-Hwa
Format: Patent
Sprache:eng
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Zusammenfassung:An electronic package structure and its manufacturing method are provided. The electronic package structure includes an interposer, a circuit board, a chip, and a circuit structure. The interposer includes an interposer substrate and a coaxial conductive element located in the interposer substrate. The interposer substrate includes a cavity. The coaxial conductive element includes a first conductive structure, a second conductive structure surrounding the first conductive structure, and a first insulation structure. The first insulation structure is disposed between the first and second conductive structures. The circuit board is disposed on a lower surface of the interposer substrate and electrically connected to the coaxial conductive element. The chip is disposed in the cavity and located on the circuit board, so as to be electrically connected to the circuit board. The circuit structure is disposed on an upper surface of the interposer substrate and electrically connected to the coaxial conductive element.