ULTRAPURE WATER MANUFACTURING FACILITY

An ultrapure water manufacturing facility includes: a first tank; a plurality of reverse osmosis membranes sequentially arranged downstream of the first tank; an electrodeionization device arranged downstream of the plurality of reverse osmosis membranes; an ion exchange resin tower arranged downstr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Lee, Younhaeng, Ham, Changyeol, Yang, Seungyong, Shin, Cheolmin, Choi, Wuyoung
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:An ultrapure water manufacturing facility includes: a first tank; a plurality of reverse osmosis membranes sequentially arranged downstream of the first tank; an electrodeionization device arranged downstream of the plurality of reverse osmosis membranes; an ion exchange resin tower arranged downstream of the electrodeionization device and filled with a boron selective resin; and a chemical supplier arranged between the plurality of reverse osmosis membranes and configured to supply a pH regulator to treatment-target water.