DEFECT INSPECTION APPARATUS

This defect inspection apparatus (100) is provided with an excitation unit (1), a laser illumination unit (2), an interference unit (30), an imaging unit (31), a holding member (4) for holding the imaging unit at a position spaced apart from an inspection target (90) by a predetermined distance, a c...

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Bibliographische Detailangaben
Hauptverfasser:	HORIKAWA, Hiroshi, TAKUBO, Kenji
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	This defect inspection apparatus (100) is provided with an excitation unit (1), a laser illumination unit (2), an interference unit (30), an imaging unit (31), a holding member (4) for holding the imaging unit at a position spaced apart from an inspection target (90) by a predetermined distance, a connecting member (5) for connecting the holding member or the imaging unit and the excitation unit, and a controller (6) for generating an image (61) related to the propagation of an elastic wave on an inspection target.