FLUID CONTROL DEVICE, FLUID SUPPLY SYSTEM, AND FLUID SUPPLY METHOD

FLUID CONTROL DEVICE, FLUID SUPPLY SYSTEM, AND FLUID SUPPLY METHOD

A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKIMOTO, Masahiko, SHINOHARA, Tsutomu, NISHINO, Kouji, YOSHIDA, Toshihide
Format: Patent
Sprache:eng
Schlagworte:
CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Beschreibung
Zusammenfassung:A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.