TRANSDUCER, ELECTRONIC DEVICE AND TRANSDUCER ARRAY

The present disclosure is related to a transducer. The transducer includes a substrate. A plurality of vibrating membranes, in a configuration of cantilevers, are disposed on a main surface of the substrate. A plurality of piezoelectric elements are stacked on the plurality of vibrating membranes fo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAIKI, TAKASHI, GODA, KENJI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present disclosure is related to a transducer. The transducer includes a substrate. A plurality of vibrating membranes, in a configuration of cantilevers, are disposed on a main surface of the substrate. A plurality of piezoelectric elements are stacked on the plurality of vibrating membranes for generating a voltage to excite each vibrating membrane. The cantilevers of the plurality of vibrating membranes extend in a direction from a reference point on the main surface toward the cantilevers, or in a direction from the cantilevers toward the reference point.