MECHANICAL PROPERTY MEASURING APPARATUS, MECHANICAL PROPERTY MEASURING METHOD, SUBSTANCE MANUFACTURING EQUIPMENT, SUBSTANCE MANAGEMENT METHOD, AND SUBSTANCE MANUFACTURING METHOD

Provided are a mechanical property measuring apparatus and method that can accurately measure a mechanical property through physical quantities, etc. A mechanical property measuring apparatus (100) comprises: a physical quantity measuring unit (5) configured to measure a plurality of physical quanti...

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Bibliographische Detailangaben
Hauptverfasser: OZEKI, Takafumi, TERADA, Kazuki, MATSUI, Yutaka, IZUMI, Daichi, IMANAKA, Hiroki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Provided are a mechanical property measuring apparatus and method that can accurately measure a mechanical property through physical quantities, etc. A mechanical property measuring apparatus (100) comprises: a physical quantity measuring unit (5) configured to measure a plurality of physical quantities of a measured object that includes a substance and a film on a surface of the substance; a calculation model generating unit (81) configured to select a plurality of pieces of learning data and generate a calculation model for calculating a mechanical property of the substance; and a mechanical property calculating unit (82) configured to calculate the mechanical property of the substance using the calculation model generated and at least two of the plurality of physical quantities, wherein the selection physical quantities include at least one physical quantity measured using a first measurement signal and at least one physical quantity measured using a second measurement signal.