APPARATUS
An apparatus includes a vibration portion, a first protection member covering a first surface of the vibration portion, and a second protection member covering a second surface of the vibration portion, wherein at least one of the first protection member and the second protection member includes a f...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An apparatus includes a vibration portion, a first protection member covering a first surface of the vibration portion, and a second protection member covering a second surface of the vibration portion, wherein at least one of the first protection member and the second protection member includes a first layer including a metal material or an inorganic material. |
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