EUV TRANSMISSIVE MEMBRANE

Provided is an EUV transmissive membrane including a main layer composed of metallic beryllium and a protective layer composed of beryllium nitride that covers at least one side of the main layer.

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Bibliographische Detailangaben
Hauptverfasser:	KONDO, Atsuo, CHAEN, Hiroki, KASHIWAYA, Toshikatsu, TANIMURA, Takashi
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	Provided is an EUV transmissive membrane including a main layer composed of metallic beryllium and a protective layer composed of beryllium nitride that covers at least one side of the main layer.