UNIT AND METHOD FOR DECOMPOSING OZONE, AND SUBSTRATE TREATING APPARATUS INCLUDING THE UNIT

Disclosed is a method of decomposing ozone in ozone water. According to the present invention, a temperature of ozone water is increased by mixing ozone water with heated water, and the ozone in the ozone water is decomposed into oxygen by the increase in the temperature.

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Choi, Young Seop, Lee, Bok Kyu, Sim, Byung Woo, Ko, Yong Sun, Jeon, Myung A
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY METALLURGY TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Disclosed is a method of decomposing ozone in ozone water. According to the present invention, a temperature of ozone water is increased by mixing ozone water with heated water, and the ozone in the ozone water is decomposed into oxygen by the increase in the temperature.