MEMS DEVICE, NEARFIELD LOUDSPEAKER, HEARABLE, MEMS PUMP, LOUDSPEAKER AND METHOD FOR CONTROLLING AN MEMS DEVICE

MEMS DEVICE, NEARFIELD LOUDSPEAKER, HEARABLE, MEMS PUMP, LOUDSPEAKER AND METHOD FOR CONTROLLING AN MEMS DEVICE

An MEMS device includes a substrate with a substrate plane, a mass element having a rest position and configured to perform a deflection from the rest position parallel to the substrate plane and in a fluid surrounding the mass element. Further, the MEMS device includes a spring arrangement that is...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SCHENK, Hermann, MELNIKOV, Anton, EHRIG, Lutz
Format: Patent
Sprache:eng
Schlagworte:
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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Beschreibung
Zusammenfassung:An MEMS device includes a substrate with a substrate plane, a mass element having a rest position and configured to perform a deflection from the rest position parallel to the substrate plane and in a fluid surrounding the mass element. Further, the MEMS device includes a spring arrangement that is coupled between the substrate and the mass element and configured to deform based on the deflection. An actuator structure is provided that is coupled to the mass element by means of a coupling and configured to apply a force to the mass element by means of the coupling to cause the deflection and a movement of the fluid.