RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD

RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD

A resist composition which generates an acid when the resist composition is exposed and whose solubility with respect to a developing liquid varies by action of the acid. The resist composition contains a base material component whose solubility with respect to a developing liquid is varied by actio...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SAKATA, Makoto, Inari, Takatoshi, Arai, Masatoshi
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Beschreibung
Zusammenfassung:A resist composition which generates an acid when the resist composition is exposed and whose solubility with respect to a developing liquid varies by action of the acid. The resist composition contains a base material component whose solubility with respect to a developing liquid is varied by action of an acid and an acid generator component that generates an acid when the acid generator component is exposed. The base material component contains a polymer compound that includes a constituent represented by a general formula (a-1) described in the specification and a constituent (a2) represented by a general formula (a-2) described in the specification. The acid generator component contains a compound represented by a general formula (b1) described in the specification.