METHOD AND EQUIPMENT FOR LEAKAGE TESTING OF ELECTROSTATIC CHUCK

The present invention provides a method for leakage testing of an electrostatic chuck. The method for leakage testing of an electrostatic chuck comprises: a mounting step of mounting the electrostatic chuck on a test stage of a testing chamber; a loading step of loading a dummy substrate in an upper surface of the electrostatic chuck; a decompression step of decompressing an interior of the testing chamber; a tracking fluid supply step of supplying a tracking fluid with visibility to a flow path of the electrostatic chuck; a photographing step of photographing the electrostatic chuck; and a determination step of determining whether a leakage occurs in the flow path by examining an image photographed in the photographing step.