METHOD AND SYSTEM FOR MEASURING A SURFACE TOPOGRAPHY OF AN OBJECT

A method for measuring the surface topography of an object including the following steps: a) providing source radiation and dividing the source radiation into illumination radiation and reference radiation, b) illuminating the surface of the object with illumination radiation in a planar illumination field, the surface of the object being illuminated simultaneously with more than one spatial radiation mode and the radiation modes of the illumination being spatially and temporally coherent, but with a fixed phase difference from one another, and c) overlaying the reference radiation on illumination radiation back-scattered at the surface of the object, and detecting an interference signal of the overlaid radiation with a detector. Steps a) to c) are carried out for at least two different, fixed wavelengths. The surface topography of the object is determined by means of digital holography.