LASER-ENHANCED CHEMICAL VAPOR DEPOSITION

A laser-enhanced chemical vapor deposition transport system includes a resistive heated crucible and, projecting from the crucible at a first end, a plurality of spokes. The spokes are configured to deliver, substantially simultaneously, vaporized and/or sublimated media powder from the crucible to...

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Bibliographische Detailangaben
Hauptverfasser:	Harris, Rodney S, Topping, Stephen G
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A laser-enhanced chemical vapor deposition transport system includes a resistive heated crucible and, projecting from the crucible at a first end, a plurality of spokes. The spokes are configured to deliver, substantially simultaneously, vaporized and/or sublimated media powder from the crucible to a plurality of deposition sites, deliver precursor gasses to the deposition sites and propagate beams emitted from one or more laser sources to the deposition sites.