DEVICE COMPRISING AN ANODIC POROUS REGION SURROUNDED BY A TRENCH HAVING AN ELECTRICAL ISOLATION BARRIER, AND CORRESPONDING METHOD
An electrical device that includes: a metal barrier layer; an anodic porous oxide region on the metal barrier layer; a trench around the anodic porous oxide region reaching the metal barrier layer; a liner at least on a wall of the trench on a side of the anodic porous oxide region forming an electr...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An electrical device that includes: a metal barrier layer; an anodic porous oxide region on the metal barrier layer; a trench around the anodic porous oxide region reaching the metal barrier layer; a liner at least on a wall of the trench on a side of the anodic porous oxide region forming an electrical isolation barrier and having an opening onto the anodic porous oxide region; a hard mask arranged above the trenches and the liner having an opening onto the anodic porous oxide region. A corresponding manufacturing method is also disclosed. |
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